Comparison of ˆ311‰ Defect Evolution in SIMOX and Bonded SOI Materials
نویسندگان
چکیده
Department of Materials Science and Engineering, and Department of Electrical and Computer Engineering, SWAMP Center, University of Florida, Gainesville, Florida 32611, USA Department of Electrical and Computer Engineering, SWAMP Center, University of Florida, Gainesville, Florida 32611, USA IBM Semiconductor Research and Development Center, Research Division, Yorktown Heights, New York 10598, USA
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